The laboratory's film deposition equipment (top right, top left)and examples of fabricated devices (bottom right, bottom left). The Functional Thin Films Lab (Ueda Lab) is a relatively new lab that started in 2022. The head of the lab is Kenji Ueda. He obtained his Doctor of Science degree from Osaka University. Ueda began conducting research on thin film materials and devices in his doctoral program and has been working in the field for nearly 30 years. Ueda Lab is equipped with a diverse range of deposition equipment (plasma chemical vapor deposition [CVD]), molecular beam epitaxy [MBE], and sputtering equipment) and features an environment that enables the thinning of a wide range of materials. Electronic devices today are made by thinning and layering a variety of materials. This lab has produced a range of devices such as a field effect transistor (FET) and optical sensor array by forming film with the above equipment and microfabrication. One of our lab’s main selling points is that we produce high-performance devices with new functions by thinning target materials and enhancing their quality as much as possible; in other words, we produce innovative devices by carrying out the entire process from material synthesis to device production. Recently our lab has been focusing efforts on making high-performance devices with new functions by using diamond semiconductors and carbon materials such as graphene based on semiconductor engineering. Students of this lab gain the skills to carry out the front-end process of semiconductor manufacturing—in other words deposition and microfabrication (e.g., lithography, etching)—and evaluate electronic properties of electronic devices such as FET and diodes by themselves, so they are able to immediately apply their skills at semiconductor material and device manufacturers. The lab currently conducts research focusing on two main themes: (1) Developing high-performance power devices that use diamond semiconductors and (2) searching for new functions and researching device applications with diamond semiconductors and graphene interfaces (with a focus on developing new optical sensors that mimic brain functions). With regard to (1), we are developing high-performance vertical FET in a joint research project with Power Diamond Systems, Inc. and the Kyushu Institute of Technology as part of a national NEDO leading research program since fiscal 2024 and are tirelessly conducting research to develop practical diamond vertical power FET. Our lab’s research mainly focuses on film growth, new material development, and device production. Come visit us if you are interested. We are always looking for students who want to create new materials and devices by themselves or are interested in nanotechnology. Come research with us!Research at IPS08Striving to create innovative new materials and devices with film growth technology(UEDA Kenji Lab.)Production Systems FieldFunctional Thin Films Lab.
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